HF Vapor Etching Hood(MHFF-01AR) was successful applied in MEMS Release Process by SINANO,China.

This facility is fabricated by MST with excellent flexibility of operation and space/good safety for operation and facility/stable process control. It is a good choice for R&D in MEMS Release and Silicon back metallization.

To get the details on this facility you can check the below

http://www.szmst.com/cn/products.asp?menuid=122

Or directly contact us via

Email ：mst168@126.com

Office phone ：Tel：+86 0755 22303270

Mobile phone ： +86 13699877985

Technical direct：James Gao