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Micro-Electroplating for Wafer
HF vapor etching
auto wafer clean and etch hood
porous silicon etching
etch for metal and dielectric layer
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Micro-Structure Technology (MST) focuses on the development and manufacture of the equipments in the fields of Hi-Tech.. Micro-electroplating and Micro-etching equipments are our main series of products which are designed for Mems, Semiconductor, Led, Advanced package, Micro-module and so on.

All products include two types of productive and experimental which can meet different needs in market.

MST can modifies every equipment per user’ requirements of process and facility.

OEM is one of MST’s services. Our services can realize your dreams. At same time MST also supplies technical inquiry and training on the processes and equipments to MST's users.

news center
WAFER SPIN ETCHER IS QUALIFIED BY OUR CUSTOMER 2013-11-18
HF Vapor Etching Hood used at SILAN Integrated Circuit in China 2013-10-28
HF Vapor Etching Hood used at SINANO in China 2013-10-28
Mini electroplating station for precious metal. 2011-10-11
MST patent certificate( HF vapor etching 2011-10-11
the certification of wet PSS etcher 2011-10-11
MST patent news 2009-11-20

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